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The crystal growth technology of lead zirconate titanate (PZT) thin films with high piezoelectric capability brought about by high precision crystallinity on a Si substrate using original sputtering machine of the Company.
This motion sensor is equipped with a highly sensitive, extremely thin detection element and a newly developed ASIC Achieve the top level performance in the market
Contribute to product development in smart phones, tablet PCs, gaming machines and etc.
The technology to realize the 3-D micro-structure by high precision vertical processing using deep RIE ( Reactive Ion Etching ), and by multi-wafer bonding ( ex. Si/glass anodic bonding, Si/Si direct bonding ) based on Silicon wafer process.
This acceleration sensor has a high sensitive capacitive element and has a glass-sealed structure
Achieve the top level performance in the market - High precision High reliability
Contribute to product development in car navigation systems, projectors, vehicular products, etc.
The thin-film MEMS technology offers ease of use, safety, comfort, and convenience, and contributes to the creation of a eco-friendly, comfortable and safe future.
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