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Thin-Film MEMS Technology for Creating a New Future for People and the Earth

We have received the 43th Ichimura Industrial Award in 2011Piezoelectric thin-films growth technology

The crystal growth technology of lead zirconate titanate (PZT) thin films with high piezoelectric capability brought about by high precision crystallinity on a Si substrate using original sputtering machine of the Company.

product/application example :

Motion sensor

This motion sensor is equipped with a highly sensitive, extremely thin detection element and a newly developed ASIC Achieve the top level performance in the market

  • Low-noise
  • Multi-function

Contribute to product development in smart phones, tablet PCs, gaming machines and etc.

Industrial inkjet head

Actuators using the piezoelectric thin film (PZT) achieve the following characteristics:
Size reduction
Higher speed
Lower voltage
Longer life
Application example:
Industrial printing machines

Major makers Adopt Car navigation systems3-D Process Technology (microfabrication, bonding)

The technology to realize the 3-D micro-structure by high precision vertical processing using deep RIE ( Reactive Ion Etching ), and by multi-wafer bonding ( ex. Si/glass anodic bonding, Si/Si direct bonding ) based on Silicon wafer process.

product/application example : Acceleration sensor

This acceleration sensor has a high sensitive capacitive element and has a glass-sealed structure

Achieve the top level performance in the market - High precision High reliability

Contribute to product development in car navigation systems, projectors, vehicular products, etc.

Industrial applications and development

  • Micro-machinery achieves space saving and low energy consumption, leading to the creation of a resource-saving environment.
  • High quality, highly reliable angular rate/acceleration sensor making good use of vehicular product technologies.
  • Expansion into new fields, such as motion sensing for smart phones and bio-MEMS.

The thin-film MEMS technology offers ease of use, safety, comfort, and convenience, and contributes to the creation of a eco-friendly, comfortable and safe future.

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Global Home Automotive & Industrial Systems Company > Automotive & Industrial Systems Company - Industrial Devices > Technology and Research & Development > Thin-Film MEMS Technology